Product Description
KLA-TENCOR SURFSCAN 6420 SURFACE INSPECTION SYSTEM consisting of:PSD
– Model: Surfscan 6420
– Bare wafer surface defect inspection system
– Substrate/Sizes: 2″, 3″, 4″, 6″ and 8″ Wafer Capable
– Substrate Thickness: Adjustable up to 12 mm.
– Material: any surface that scatters less than 90% of incident light
– Cassette Handling: Single puck handling from single cassette or platform.
– Defect Sensitivity: Most Surfaces: Better than 0.12 um (depending upon surface quality).
– Defect Sensitivity: Polished Silicon: Better than 0.12 um at 95% capture rate.
– Illumination Source: 30 mW Argon-Ion laser, 488 nm wavelength
– Operating Software: Windows 98 Operating Software
– Operations Manual and Documentation
– Refurbished to Factory Specifications (see below for full details)
– System calibrated to OEM specifications
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