24% off

KLA-Tencor Surfscan 6420 Defect Inspection System-1007-TEST

Current price is: NT$ 1,900,000.00. Original price was: NT$ 2,500,000.00.

KLA-Tencor Surfscan 6420 Defect Inspection System:PD
Manufacturer: KLA-Tencor
Model: Surfscan 6420
Vintage: N/A
Max Wafer: 200mm
System Dimensions: 30 x 41 x 66
Weight: 726 lbs

Condition: Used

Location:North East, Pennsylvania, United States

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Product Description

KLA-TENCOR SURFSCAN 6420 SURFACE INSPECTION SYSTEM consisting of:PSD

– Model: Surfscan 6420

– Bare wafer surface defect inspection system

– Substrate/Sizes: 2″, 3″, 4″, 6″ and 8″ Wafer Capable

– Substrate Thickness: Adjustable up to 12 mm.

– Material: any surface that scatters less than 90% of incident light

– Cassette Handling: Single puck handling from single cassette or platform.

– Defect Sensitivity: Most Surfaces: Better than 0.12 um (depending upon surface quality).

– Defect Sensitivity: Polished Silicon: Better than 0.12 um at 95% capture rate.

– Illumination Source: 30 mW Argon-Ion laser, 488 nm wavelength

– Operating Software: Windows 98 Operating Software

– Operations Manual and Documentation

– Refurbished to Factory Specifications (see below for full details)

– System calibrated to OEM specifications

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