Product Description
ghi-line stepper -Working condition, no known issues
• 2 um ghi-line Broadband Lens • Windows Base Operator Station
• Robotic Loader (60 minute wafer size change)
• PATMAX MVS Alignment System • 3 X 5 Inch Reticle
• 6 inch Wafers
• 30 X 15 Field size – Manual Aperture
• Lens Distortion Reference – No Lens Matching
• 115V Power Source
• Four Color Signal Light Tower
• Single Probe Focus Software
• Focus Mapping (Grid Focus)Software
• MVS Manual Alignment Software
• Topside EGA Software
• Step Specific Process Modes Software
• Focus Mode: SPF Software