Product Description
TRACK
High Reliability and Productivity Coater Developer (5C/5D)
The CLEAN TRACK™ LITHIUS™ Series is the latest coater/developer equipped with high-technology succeeding from the CLEAN TRACK™ ACT™ series. The key concepts are extensibility to advanced processes, high throughput, reduced footprint, improved OEE (Overall Equipment Efficiency), and CoO (Cost of Ownership) reduction. Successor to the ACT – 200mm or 300mm, more modules and faster throughput (150 wph).
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